Compensating for line pressure span effects for diaphragm pressure sensors

摘要

The differential pressure sensor (56) for detecting the differential pressure of the process fluid includes a sensor body (114, 116) in which a sensor cavity (132, 134) having a cavity shape is formed. The diaphragm (106) in the sensor cavity bends according to the applied differential pressure. The diaphragm (106) has a diaphragm shape. The gap formed between the cavity shape and the diaphragm shape varies as a function of the differential pressure. At least one of the cavity shape and the diaphragm shape changes as a function of line pressure to compensate for gap changes due to deformation from the sensor body line pressure.