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Miniature fiber optic pressure sensor with composite polymer-metal diaphragm for intradiscal pressure measurements

机译:带有复合聚合物金属膜片的微型光纤压力传感器用于刻度内压力测量

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摘要

We developed a miniature fiber optic pressure sensor system and utilized it for in vitro intradiscal pressure measurements for rodents. One of the unique features of this work is the design and fabrication of a sensor element with a multilayer polymer-metal diaphragm. This diaphragm consists of a base polyimide layer (150 nm thick), a metal reflective layer (1 μm thick), and another polyimide layer for protection and isolation (150 nm thick). The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration and in vitro rodent intradiscal pressure measurements, the sensor element exhibits a linear response to the applied pressure over the range of 0–70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa. To our best knowledge, this work is the first successful demonstration of rodent intradiscal pressure measurements.
机译:我们开发了微型光纤压力传感器系统,并将其用于啮齿类动物的体外椎间盘内压力测量。这项工作的独特特征之一是带有多层聚合物金属膜片的传感器元件的设计和制造。该膜片由基础聚酰亚胺层(厚度为150 nm),金属反射层(厚度为1μm)和另一个用于保护和隔离的聚酰亚胺层(厚度为150 nm)组成。传感器元件具有生物相容性,可以通过简单的批生产方法在非洁净室环境中以良好的设备间一致性进行制造。所制造的传感器元件具有仅366μm的外径,该外径足够小,可以插入到啮齿动物盘中,而不会破坏结构或改变盘内压力。在校准和体外啮齿动物腹腔内压力测量中,传感器元件在0–7​​0 kPa的范围内表现出对所施加压力的线性响应,灵敏度为0.0206μm/ kPa,分辨率为0.17 kPa。据我们所知,这项工作是啮齿类动物椎间盘内压力测量的首次成功演示。

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