New Analytical Solution for Diaphragm Deflection and its Application to a Surface-211 Micromachined Pressure Sensor

摘要

An analytical solution for large deflections of a clamped circular diaphragm with211u001ebuilt-in stress is presented. The solution is directly applicable to 211u001emicromachined pressure sensors. The solution is compared to finite element 211u001eanalysis results and experimental data from a surface-micromachined pressure 211u001esensor.