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Compensating for line pressure span effects for diaphragm pressure sensors
Compensating for line pressure span effects for diaphragm pressure sensors
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机译:补偿膜片压力传感器的管路压力跨度影响
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摘要
A differential pressure sensor for sensing a differential pressure of a process fluid, includes a sensor body having a sensor cavity formed therein with a cavity profile. A diaphragm in the sensor cavity deflects in response to an applied differential pressure. The diaphragm has a diaphragm profile. A gap formed between the cavity profile and the diaphragm profile changes as a function of the differential pressure. At least one of the cavity profile and diaphragm profile changes as a function of a line pressure to compensate for changes in the gap due to deformation of the sensor body from the line pressure.
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