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A method of forming a GaN layer on a silicon substrate and a method of forming a GaN substrate
A method of forming a GaN layer on a silicon substrate and a method of forming a GaN substrate
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机译:在硅衬底上形成GaN层的方法以及形成GaN衬底的方法
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摘要
Substrates of GaN over silicon suitable for forming electronics devices such as heterostructure field effect transistors (HFETs), and methods of making the substrates, are disclosed. Voids in a crystalline Al 2 O 3 film on a top surface of a silicon wafer are formed. The top surface of the silicon wafer is along the 111 silicon crystal orientation. A plurality of laminate layers is deposited over the voids and the Al 2 O 3 film. Each laminate layer includes an AlN film and a GaN film. A transistor or other device may be formed in the top GaN film.
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机译:公开了适用于形成诸如异质结构场效应晶体管(HFET)之类的电子器件的硅上的GaN衬底以及制造该衬底的方法。在硅晶片的顶表面上的结晶Al 2 O 3膜中形成空隙。硅晶片的顶面沿<111>硅晶体取向。在空隙和Al 2 O 3膜上沉积多个叠层。每个层压层包括AlN膜和GaN膜。可以在顶部GaN膜中形成晶体管或其他器件。
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