How incident electrons to calculate the scatter angle distribution scattered kinetically by the crystal, the apparatus and program

摘要

PROBLEM TO BE SOLVED: To provide a device capable of quantitatively calculating a scattering angle distribution of electron by a crystal easily with high accuracy.SOLUTION: The present invention includes: a thermal oscillation scattering layer Ts in which incident electrons are scattered by thermal oscillation of atoms forming a crystal; a storage part which stores crystal model M including a Bragg scattering layer Bs in which incident electrons are scattered based on the Bragg's law; and an operation part which dynamically calculates a scattering angle distribution in which the incident electrons are scattered by the crystal using the crystal model M stored in the storage part.