METHOD FOR DYNAMICALLY CALCULATING SCATTERING ANGLE DISTRIBUTION ON WHICH INCIDENT ELECTRONS ARE SCATTERED BY CRYSTAL, DEVICE AND PROGRAM THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a device capable of quantitatively calculating a scattering angle distribution of electron by a crystal easily with high accuracy.;SOLUTION: The present invention includes: a thermal oscillation scattering layer Ts in which incident electrons are scattered by thermal oscillation of atoms forming a crystal; a storage part which stores crystal model M including a Bragg scattering layer Bs in which incident electrons are scattered based on the Bragg's law; and an operation part which dynamically calculates a scattering angle distribution in which the incident electrons are scattered by the crystal using the crystal model M stored in the storage part.;COPYRIGHT: (C)2014,JPO&INPIT