Block copolymers self-assembled method, patterning the substrate and patterned template

摘要

PROBLEM TO BE SOLVED: To provide a block copolymer self-assembly method, a patterned substrate, and a patterned template.;SOLUTION: A method comprises the steps of: conducting lithography to form a first pattern on a substrate; and conducting block-copolymer self-assembly to form a second pattern on the substrate. A patterned substrate comprises first and second patterns.;COPYRIGHT: (C)2015,JPO&INPIT