BLOCK COPOLYMER SELF-ASSEMBLY METHOD, PATTERNED SUBSTRATE, AND PATTERNED TEMPLATE
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机译:嵌段共聚物自组装法,基体图案和模板
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摘要
PROBLEM TO BE SOLVED: To provide a block copolymer self-assembly method, a patterned substrate, and a patterned template.;SOLUTION: A method comprises the steps of: conducting lithography to form a first pattern on a substrate; and conducting block-copolymer self-assembly to form a second pattern on the substrate. A patterned substrate comprises first and second patterns.;COPYRIGHT: (C)2015,JPO&INPIT
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