Nanowire metal-oxide semiconductor (MOS) Field-Effect Transistors (FETs) (MOSFETs) employing a nanowire channel structure having rounded nanowire structures is disclosed. To reduce the distance between adjacent nanowire structures to reduce parasitic capacitance while providing sufficient gate control of the channel, the nanowire channel structure employs rounded nanowire structures. For example, the rounded nanowire structures provide for a decreased height from a center area of the rounded nanowire structures to end areas of the rounded nanowire structures. Gate material is disposed around rounded ends of the rounded nanowire structures to extend into a portion of separation areas between adjacent nanowire structures. The gate material extends in the separation areas between adjacent nanowire structures sufficient to create a fringing field to the channel where gate material is not adjacently disposed, to provide strong gate control of the channel even though gate material does not completely surround the rounded nanowire structures.
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