FACET-SELECTIVE GROWTH OF NANOSCALE WIRES

摘要

The present invention generally relates to nanoscale wires, and to systems and methods of producing nanoscale wires. In some aspects, the present invention is generally related to facet-specific deposition on semiconductor surfaces. In one embodiment, a first surface of a nanoscale wire, or a semiconductor, is preferentially oxidized relative to a second surface, and material is preferentially deposited on the second surface relative to the first surface. For example, the nanoscale wire or semiconductor may be a silicon nanowire that is initially exposed to an etchant to remove silicon oxide, then exposed to an oxidant under conditions such that one facet or surface (e.g., a {113} facet) is oxidized more quickly than another facet or surface (e.g., a {111} facet). Material may then be deposited or immobilized on the less-oxidized facet relative to the more-oxidized facet. Other embodiments of the invention may be directed to articles made thereby, devices containing such nanoscale wires or semiconductors, kits involving such nanoscale wires or semiconductors, semiconductor surfaces, or the like.