Method of fabricating a uniformly aligned planar array of nanowires using atomic layer deposition

摘要

Invention for producing an orderly aligned horizontally planar array of nanowires comprising:;step 1) providing a template for producing nanowires in which the template comprises an alternating multilayer stack of substrate and inert insulating thin film layers; and;step 2) fabricating an orderly aligned, horizontally planar array of nanowires by depositing atoms and/or molecules along the outer edges of the thin film substrate layers on at least one side of the template with the use of atomic layer deposition.