Highly ordered and well aligned TiN nanotube arrays fabricated via template-assisted atomic layer deposition

摘要

Highly ordered and well aligned TiN nanotube arrays were fabricated using a template-assisted method with an anodic aluminum oxide template and the ALD technique. The TiN nanotube arrays were well aligned at a low aspect ratio. However, for an aspect ratio of 14, the TiN nanotubes were clustered and bundled together due to the lateral capillary forces between the nanotubes during the air drying process where water was removed. Furthermore, good ductility of the TiN nanotube arrays was observed, which has not been reported previously.