X-ray analyzer with monocrystalline x-ray aperture and method for producing a monocrystalline x-ray aperture

摘要

The method involves introducing a through hole in a monocrystalline diaphragm body, so that the monocrystalline diaphragm body forms a peripherally through edge to limit a X-ray beam (RS). The through hole is extended in funnel-shape from the through edge into an area into a direction of an outlet opening. The spark erosions and cold laser ablation are initiated, and a material is removed from the surface of the blending body by ion-beam etching. The hole in the region of the through edge and the area is made with a circular cross-section. An independent claim is included for an X-ray analysis apparatus with an X-ray source.