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MICROBOLOMETER, METHOD FOR PRODUCING A MICROBOLOMETER, AND METHOD FOR DETECTING AN ELECTROMAGNETIC EMISSION
MICROBOLOMETER, METHOD FOR PRODUCING A MICROBOLOMETER, AND METHOD FOR DETECTING AN ELECTROMAGNETIC EMISSION
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机译:微量滴定仪,微量滴定仪的制造方法以及电磁辐射的检测方法
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摘要
The invention relates to a microbolometer (100) having an absorption layer (104) for absorbing an electromagnetic emission (106), and at least one single electron transistor (102) that is or can be thermally coupled to said absorption layer (104) and comprises a drain connection (D) and a source connection (S), the single electron transistor (102) being designed to alter a current flow between the drain connection (D) and the source connection (S) depending on a temperature of the absorption layer (104).
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