Microbolometers, a method for producing a micro bolometer and method for detecting an electromagnetic radiation

摘要

The present invention relates to a microbolometer (100) with an absorption layer (104) for absorbing electromagnetic radiation (106) and at least one with the absorption layer (104) can be coupled thermally coupled or mos - capacitor (102), which is formed, in order to its capacity as a function of a temperature of the absorption layer (104) to change.