METHOD FOR PRODUCING A device for detecting thermal radiation microbolometer containing active and passive microbolometer

摘要

1. A method for producing a device for detecting thermal radiation, comprising at least one active microbolometer (19) and at least one passive microbolometer (12), each comprising a suspended membrane (22) that performs the function of radiation absorber, thermometer and electrical connection, which consists in that the active (19) and passive (12) microbolometers formed simultaneously on a single supporting substrate (16), a reflecting screen (17) is formed on the entire device, and then removed at locations opposite the active mikrobolo etrov (19), characterized in that the membrane (22) comprising a thermometric element (14) and an element (13) absorbing the radiation, provides electrical connections, the passive microbolometer (12) is formed on the reflecting screen (17) which comprises at least one metallic layer (18) in contact with the absorbing element of the membrane (22) .2 (13). Passive microbolometer (12) made according to the method claimed of claim 1, characterized in that the reflecting screen (17) located under the membrane (22) in contact with the element (13) membrany.3 absorption. Microbolometer according to claim 2, characterized in that the thickness of the metal layer (18) is between 500 to 2000s.