EVAPORATION SOURCE CONSTRUCTION AND ARRAY FOR IMPROVING HOMOGENUITY OF DEPOSITION FILM

摘要

A purpose of the present invention is to provide a new-type evaporation source composition and an arrangement method thereof able to deposit a host material and a doping material on a large-area substrate so as to be homogeneous. According to such a purpose, the present invention fills two linear evaporation sources with the same host material when depositing a thin film in which one type of host material and other one type of doping material are combined together, fills three point evaporation sources with a doping material, arranges the three point evaporation sources to be spaced apart, and arranges the two linear evaporation sources in a gap between the point evaporation sources, thus composing a group of evaporation sources arranged in order of the point/linear/point/linear/point evaporation source and thereby starting a deposition process.