MULTI-EVAPORATION SOURCE AND AN APPARATUS FOR FORMING A THIN FILM USING THE SAME, CAPABLE OF IMPROVING DEPOSITION EFFICIENCY BY EVAPORATING AT LEAST TWO EVAPORATIVE MATERIALS AND THEN SPRAYING AND DEPOSITING THE MATERIALS ON A SUBSTRATE

摘要

PURPOSE: A multi-evaporation source and an apparatus for forming a thin film using the same are provided to use an element which has a low evaporation temperature as an evaporative material in order to lower the temperature of the source, thereby reducing power consumption.;CONSTITUTION: A multi-evaporation source includes a crucible(11), a charging pipe, a heating unit, at least two outlets(19), and a separating unit(18). The crucible has at least two filling spaces(12,13) inside in order to house evaporative materials. The charging pipe feeds the evaporative materials and feeding gas inside each filling space. The heating unit evaporates the evaporative materials which respectively fill the filling spaces. The outlets respectively and downwardly spray the evaporative materials which are evaporated inside the crucible. The separating unit separates the evaporative materials and vapors from the evaporative materials so that the evaporative materials and the vapors cannot be mutually mixed before passing through each outlet.;COPYRIGHT KIPO 2013