NON-CHEMICALLY AMPLIFIED RESIST COMPOSITION NON-CHEMICALLY AMPLIFIED RESIST FILM PATTERN FORMATION METHOD AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

摘要

A non-chemically amplified resist composition excellent in resolution in an isolated line pattern or an isolated space pattern, a non-chemically amplified resist film using the same, a pattern forming method, and a manufacturing method of an electronic device. The non-chemically amplified resist composition contains a resin (Ab) having a metal salt structure.