SUSCEPTOR EPITAXIAL GROWTH DEVICE AND EPITAXIAL WAFER

摘要

The present invention provides a susceptor capable of suppressing oscillation from a susceptor without generating a deep scratch due to contact of a lift pin or a susceptor with the back surface and chamfered portion of the wafer. The susceptor 20 of an embodiment of the present invention includes a susceptor body 30 and arcuate members 40A and 40B. The bottom surface of the counterboring portion 21 is composed of the entire surfaces 41A and 41B of the arc-shaped susceptor member and a part 33 of the surface of the susceptor main body. The entire surface of the arc-shaped members 40A and 40B raised by the lift pins 44 supports only the outer peripheral portion of the back surface of the wafer W in surface contact when the wafer W is carried.;