Semiconductor Device Including a Bit Line Contact Plug and a Buried Channel Array Transistor and Method of Fabricating the Same and a Semiconductor Module an Electronic Circuit Board and an Electronic System including the Same

摘要

Semiconductor devices including a bit line contact plug and a buried channel array transistor, a method of manufacturing the semiconductor device, and a semiconductor module, an electronic circuit board, and an electronic system including the semiconductor device are introduced. According to an aspect of the present invention, there is provided a method of fabricating a semiconductor device, comprising: preparing a semiconductor substrate including a cell region and a peripheral region; forming a cell insulating isolation region defining a cell active region in the semiconductor substrate corresponding to the cell region; A word line crossing the cell active region and the cell isolation region in a semiconductor substrate corresponding to the cell region and forming a bit line contact plug electrically connected to the cell active region on the cell active region Forming a bit line electrically connected to the bit line contact plug on the bit line contact plug and forming a peripheral insulating isolation region defining a peripheral active region in the semiconductor substrate corresponding to the peripheral region, On the semiconductor substrate corresponding to the peripheral active region, Wherein the bit line contact plug is formed at the same level as the peripheral transistor lower electrode, and the bit line is formed at the same level as the peripheral transistor upper electrode .