IMAGE RECONSTRUCTION METHOD FOR X-RAY MEASUREMENT DEVICE, METHOD FOR MANUFACTURING STRUCTURE, IMAGE RECONSTRUCTION PROGRAM FOR X-RAY MEASUREMENT DEVICE, AND X-RAY MEASUREMENT DEVICE

摘要

An image reconstruction method, includes: causing a measurement object to be irradiated with X-rays from multiple different irradiation directions by rotating the measurement object and/or changing the irradiation directions of the X-rays, detecting X-ray that passed through the measurement object in each of the multiple different irradiation directions, and generating multiple sets of detection data relating to the intensity of the X-ray that passed through the measurement object; estimating the intensity of the X-ray that is assumed to have been passed through an estimated structure, whose shape has been estimated based on shape information about the measurement object, in each of the multiple different irradiation directions if the estimated structure is assumed to be irradiated with the X-rays from the multiple different irradiation directions, and generating multiple sets of estimated data; and, extracting differential data indicating a difference between the estimated data and the detection data from the detection data using, for each of the multiple sets of detection data, the detection data and the estimated data mutually corresponding with respect to the irradiation directions of the X-rays.