ELECTRICAL CHARACTERISTIC MEASUREMENT DEVICE FOR POWER SEMICONDUCTOR CHIP AND ELECTRICAL CHARACTERISTIC MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problem that, in order to suppress partial electric discharge between an electrode at a surface side (surface electrode) and a back electrode when testing a power semiconductor chip applying a high voltage thereto, a jig made of insulating material is pressed against the chip, requiring that a jig size is changed depending on a chip size and hence requiring by-size management, and that, when sticking of a foreign matter, a flaw or deterioration occurs due to destruction marks of a defective chip, the jig made of insulating material requires replacement and, hence, incurs an increase in cost.;SOLUTION: An insulating jig for suppressing electric discharges is constructed by forming a chip's termination structure part as a divided structure and providing two types of components, a component for corners used for the corners of the terminal structure part and a component for sides used for the sides. Also, the number of components for the sides is set to be changeable. Further, it is so designed that when destruction marks due to a defective chip occur to the insulating jig, only a component of an abnormal portion is replaced.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT