OPTICAL DEVICE, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND PRODUCTION METHOD OF ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an optical device advantageous for reducing thermal deformation of a mirror.;SOLUTION: An optical device includes a base, a support part disposed on the base and supporting a mirror, a plurality of first actuators disposed between the base and the mirror and applying force to the back surface of the mirror to deform the top surface of the mirror, and a linear guide for guiding the support part along the optical axis direction of the mirror. The support part is supported by the base via the linear guide; and the linear guide is disposed to penetrate the base.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT