Micromachine type spring device and method of manufacturing micromachine type spring device

摘要

The present invention provides a micromachined apparatus and a corresponding manufacturing method. The micromachined device (10) comprises a spring device (16; 216; 316; 416; 516), at least one coupling point (24-i; 124) of the spring device (16) being a frame device. Movably coupled to (14) or coupled to said spring device (16; 216; 316; 416; 516) starting from said at least one coupling point (24-i; 124) At least one web (18-i; 218-i; 318-i; 518-1), the at least one web (18-i; 218-i; 318-i; 518-) 1) the spring is structured and has at least one first part (20-i; 220-i) and wider than the first part (20-i; 220-i) Debye And a (522 22-i;; 222-i) at least one widened portion for reducing the nonlinearity of (16).