CLASP (Capture and Locking alignment Spring Positioner): A micromachined fiber auto-positioning device

摘要

This work provides a method of mechanical alignment of an array of single mode fibers to an array of optical devices. The technique uses a micromachined metal spring, which captures a vertical, pre- positioned fiber, moves it into accurate alignment, and holds it for attachment. The spring is fabricated from electroplated mickel, using photodefined polyimide as a plating mask. The nickel is plated about 80 (mu)m thick, so that a large fiber depth is captured. In one application, the nickel springs can be aligned to optics on the back side of the substrate. This entire concept is referred to as CLASP (Capture and Locking Alignment Spring Positioner). These springs can be used for general alignment and capture of any fiber to any optical input or output device. Passive alignment of fiber arrays to (plus)/(minus) 2(mu)m accuracy has been demonstrated, with a clear path to improved accuracy.