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Micromachine type spring device and method of manufacturing micromachine type spring device
Micromachine type spring device and method of manufacturing micromachine type spring device
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机译:微机械型弹簧装置及其制造方法
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摘要
A micromechanical device and a corresponding manufacturing method. The micromechanical device includes: a spring element which is moveably coupleable or is moveably coupled to a frame unit at at least one connecting point of the spring element, the spring element including at least one web, which extends outward from the at least one connecting point; and the at least one web being structured in such a way that it includes at least one first section as well as at least one widening section for reducing a non-linearity of the spring element, which is widened compared to the first section.
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