X-RAY DIFFRACTION MEASURING DEVICE AND METHOD FOR MEASURING WIDTH OF DIFFRACTION IMAGE OF X-RAY DIFFRACTION IMAGE

摘要

PROBLEM TO BE SOLVED: To provide a device and a method which can measure the width of a diffraction image showing the state of a measurement target accurately even if the measurement target is being thermally processed or has been thermally processed.;SOLUTION: The temperature of a measurement target is detected when an X-ray diffraction image is taken, a Bragg angle Θc at the detected temperature is calculated using the detected temperature, the coefficient of thermal expansion of the measurement target obtained in advance, and a Bragg angle Θm at a predetermined temperature of the measurement target, and the value obtained by multiplying the measured width of the diffraction image by the value of (cosΘc/cosΘm) is set to be a corrected diffraction image width.;SELECTED DRAWING: Figure 8;COPYRIGHT: (C)2018,JPO&INPIT