X-ray diffraction measurement apparatus and diffraction image width measurement method of X-ray diffraction image

摘要

To provide an apparatus and a method capable of accurately measuring the diffraction image width representing the state of an object to be measured, even if the object to be measured is one during or after the heat treatment.SOLUTION: The temperature of an object to be measured is detected at the time of imaging the X-ray diffraction image, and the detected temperature and the previously obtained coefficient of thermal expansion of the object to be measured and the Bragg angle m at a predetermined temperature of the object to be measured , The Bragg angle c at the detected temperature is calculated and a value obtained by multiplying the measured diffraction image width by (cos c / cos m) is taken as the corrected diffraction image width.(FIG.