Method for measuring dimension of vapor deposition mask, apparatus for applying tension of vapor deposition mask and apparatus for measuring dimension of vapor deposition mask

摘要

PROBLEM TO BE SOLVED: To provide a dimensional measurement method of a vapor deposition mask capable of improving accuracy of dimensional measurement by correcting accurately the attitude of the vapor deposition mask.SOLUTION: In a dimensional measurement method of a vapor deposition mask, first of all, the vapor deposition mask 20 is placed on a base 51, and each pin 64 is inserted into each of mask holes 27 of the vapor deposition mask 20. Then, one pin 64 is moved in a direction separating from the other pin 64, to thereby apply a tension onto the vapor deposition mask 20. A dimension of the vapor deposition mask 20 is measured in the state where the tension is applied onto the vapor deposition mask 20.SELECTED DRAWING: Figure 10