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Method for measuring size of deposition mask, tension applying device for vapor deposition mask, and measuring apparatus for deposition mask
Method for measuring size of deposition mask, tension applying device for vapor deposition mask, and measuring apparatus for deposition mask
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机译:测量沉积掩模尺寸的方法,用于气相沉积掩模的张力施加装置以及用于沉积掩模的测量设备
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摘要
PROBLEM TO BE SOLVED: To provide a dimensional measurement method of a vapor deposition mask capable of improving accuracy of dimensional measurement by correcting accurately the attitude of the vapor deposition mask.SOLUTION: In a dimensional measurement method of a vapor deposition mask, first of all, the vapor deposition mask 20 is placed on a base 51, and each pin 64 is inserted into each of mask holes 27 of the vapor deposition mask 20. Then, one pin 64 is moved in a direction separating from the other pin 64, to thereby apply a tension onto the vapor deposition mask 20. A dimension of the vapor deposition mask 20 is measured in the state where the tension is applied onto the vapor deposition mask 20.SELECTED DRAWING: Figure 10
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