Method for manufacturing concave-convex pattern formed body and imprint apparatus

摘要

Provided is a method for producing a concavo-convex pattern forming body, in which a mold can be easily attached to and detached from a roll, the mold peeled off from the roll can be reused, and the transfer operation and the curing operation need not be performed simultaneously. The method for producing a concavo-convex pattern formed body of the present invention includes a step (1) of detachably winding and holding a film mold having a concavo-convex pattern on a roll on a roll, and a substrate containing a transferred resin layer on a substrate mounting portion. Step (2) of placing the transfer body, the roll is rotated while the film mold is in contact with the surface of the transfer resin layer, and the film mold is peeled off from the roll and unwound on the transfer resin layer. And a step (3) of transferring the concavo-convex pattern on the surface of the film mold to the transferred resin layer, a step of curing the transferred resin layer (4), and a film mold laminated on the cured transferred resin layer. And a step (5) of rotating the roll while abutting, peeling the film mold from the cured resin layer to be transferred and winding it on the roll.