Z-AXIS STRUCTURE OF ACCELEROMETER AND MANUFACTURING METHOD OF Z-AXIS STRUCTURE

摘要

The present invention discloses a Z-axis structure of an accelerometer and a manufacturing method of the Z-axis structure. The Z-axis structure comprises a substrate, fixed electrodes and a mass block, wherein first anchor is arranged on a surface of the substrate; the fixed electrode is connected onto the corresponding first anchor at an end thereof; the fixed electrode is suspended above the substrate via the first anchor; an intermediate anchor is also arranged on the surface of the substrate; and the mass block is suspended above the fixed electrode via the intermediate anchor. In the Z-axis structure of the present invention, the fixed electrode is connected to the substrate by the first anchor, so that there is certain gap between the fixed electrode and the substrate. Because of the gap, the path for deformation to transmitting from the substrate to the fixed electrode is cut off, such that contact area between the fixed electrode and the substrate is reduced, effectively preventing the deformation of the substrate caused by changes of external stress and temperature from transmitting to the fixed electrode, and greatly reducing zero point offset of a Z-axis structure.