首页> 外国专利> Method for preparing target structure to be tested in sample, involves imaging target structure in focus of microscope optics, which has z-axis, where sample transverse to z-axis is cut in sample area above or below target structure

Method for preparing target structure to be tested in sample, involves imaging target structure in focus of microscope optics, which has z-axis, where sample transverse to z-axis is cut in sample area above or below target structure

机译:制备样品中待测目标结构的方法,涉及在具有z轴的显微镜光学系统的焦点上对目标结构成像,其中在目标结构上方或下方的样品区域中切割与z轴垂直的样品

摘要

The method involves imaging a target structure (2) in a focus of a microscope optics, which has a z-axis. The sample transverse to the z-axis is cut in a sample area above or below the target structure for producing a first reference surface (F1) with a cutter. The first reference surface is displayed in the focus of the microscope optics by refocusing the target structure to the first reference surface, and determines the necessary relative movement between the sample and the microscope optics in the z-direction as an optical path length (z1). An independent claim is included for a device for preparing a target structure to be tested in a sample.
机译:该方法包括在具有z轴的显微镜光学器件的焦点中对目标结构(2)成像。横向于z轴的样品在目标结构上方或下方的样品区域中被切割,以利用切割器产生第一参考表面(F1)。通过将目标结构重新聚焦到第一参考表面上,将第一参考表面显示在显微镜光学系统的焦点上,并确定样品和显微镜光学系统之间在z方向上的必要相对移动作为光路长度(z1) 。包括用于制备样品中待测试的靶结构的装置的独立权利要求。

著录项

  • 公开/公告号DE102012016316A1

    专利类型

  • 公开/公告日2014-02-13

    原文格式PDF

  • 申请/专利权人 CARL ZEISS AG;

    申请/专利号DE20121016316

  • 发明设计人 THOMAS CHRISTIAN;EDELMANN MARTIN;

    申请日2012-08-10

  • 分类号G01N1/28;G01N21/21;G02B21/00;

  • 国家 DE

  • 入库时间 2022-08-21 15:37:55

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