Optical scanner controller correcting method for sample image scanning device, involves correcting transfer function based on variations of parameters so that deviation of actual position of structure from target position is reduced

摘要

The method involves correcting transfer function based on variations of parameters, which are utilized for control and/or regulation in such a manner that deviation of an actual position of structure from a target position of the structure during utilization of the corrected parameters and/or corrected transfer function is reduced. Image data is detected only in a utility area. Independent claims are also included for the following: (1) a device for producing an image of a sample (2) a method for correcting feedback signals of position sensors for the image producing device.