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PERMANENT MAGNETIC CHUCK FOR OLED MASK CHUCKING
PERMANENT MAGNETIC CHUCK FOR OLED MASK CHUCKING
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机译:用于OLED面膜卡盘的永磁吸盘
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摘要
A permanent magnetic mask chuck is described herein. The permanent magnetic mask chuck includes a body with a plurality of permanent magnets positioned therein. The permanent magnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition.
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