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Electromagnetic chuck for OLED mask chucking
Electromagnetic chuck for OLED mask chucking
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机译:OLED吸盘用电磁吸盘
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摘要
An electromagnetic mask chuck is described herein. The electromagnetic mask chuck includes a body with a plurality of electromagnets formed therein. The electromagnets can then deliver a magnetic force to a mask to position and hold the mask over or on the substrate for further deposition. The electromagnets are controlled using a power source, to deliver a controlled magnetic field to the mask.
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