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Integrated circuit structure without gate contact and method of forming same

机译:无栅极接触的集成电路结构及其形成方法

摘要

One aspect of the disclosure relates to an integrated circuit structure. The integrated circuit structure may include: a gate structure between a pair of gate spacers within a dielectric layer and substantially surrounding a fin, wherein the gate structure is disposed adjacent to a channel region within the fin; and a source/drain contact extending within the dielectric layer to a source/drain region within a fin, the source/drain contact being separated from the gate structure by at least one gate spacer in the pair of gate spacers, wherein the channel region and the source/drain region provide electrical connection between the gate structure and the source/drain contact.
机译:本公开的一个方面涉及一种集成电路结构。该集成电路结构可以包括:栅极结构,其在介电层内的一对栅极间隔物之间​​并且基本上围绕鳍片,其中,该栅极结构设置成与鳍片内的沟道区相邻;以及源极/漏极触点在电介质层内延伸到鳍片内的源极/漏极区域,该源极/漏极触点通过一对栅极间隔物中的至少一个栅极间隔物与栅极结构分开,其中沟道区和源极/漏极区在栅极结构和源极/漏极触点之间提供电连接。

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