A method for preparing a sol-gel film is disclosed. The method comprises providing a sol-gel composition comprising one or more sol-gel film precursors and a crystallization aid, and processing the sol-gel composition by solution processing to form the sol-gel film. In certain embodiments, the sol-gel film comprises one or more metal oxides. A preferred crystallization aid includes triphenylphosphine oxide. A composition for making a sol-gel film, a sol-gel film, a device including a sol-gel film and a method for making such device are also disclosed.
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