首页> 外国专利> BONDING DEVICE, BONDING METHOD AND BONDING CONTROL PROGRAM

BONDING DEVICE, BONDING METHOD AND BONDING CONTROL PROGRAM

机译:键合装置,键合方法及键合控制程序

摘要

The objective of the invention is to perform bonding processing with respect to a plurality of bonding positions, where the respective distances to a reference (origin) position of a component to be bonded are different, without changing the moving distance of bonding means.The invention comprises: the bonding means; a bonding stage having a work-holder and a rotation mechanism unit rotating the work-holder; and a control unit controlling the rotation of the work-holder. The bonding means is provided so as to be movable relative to a carrying surface of the work-holder in a reference orientation, and has a reference position in the movement direction. The plurality of bonding points include bonding points whereof the separation distances from the reference position along the movement direction are different when the component to be bonded is in the held state by the work-holder in the reference orientation. The control unit controls the rotation of the work-holder in order to correcting for the differences in the separation distances of the plurality of bonding points.
机译:发明内容本发明的目的是在不改变接合装置的移动距离的情况下,针对多个接合位置执行接合处理,其中,到被接合部件的基准(原点)位置的各自距离不同。本发明包括:粘结装置;结合台,具有工作架和使工作架旋转的旋转机构单元。控制单元控制工作架的旋转。结合装置被设置成能够相对于工件保持器的承载表面在参考方位上移动,并且在移动方向上具有参考位置。多个接合点包括接合点,当待接合的部件在基准取向下被工件保持在保持状态时,其沿着移动方向与基准位置的分离距离不同。控制单元控制工件支架的旋转,以校正多个结合点的分离距离的差异。

著录项

  • 公开/公告号WO2017208525A1

    专利类型

  • 公开/公告日2017-12-07

    原文格式PDF

  • 申请/专利权人 KAIJO CORPORATION;

    申请/专利号WO2017JP06583

  • 申请日2017-02-22

  • 分类号H01L21/60;B23K20;

  • 国家 WO

  • 入库时间 2022-08-21 12:46:54

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号