首页> 外国专利> TRANSLUCENT FILM MANUFACTURING METHOD, OXIDE SEMICONDUCTOR HAVING ABSORPTION PROPERTY IN VISIBLE LIGHT REGION, AND MANUFACTURING METHOD THEREFOR

TRANSLUCENT FILM MANUFACTURING METHOD, OXIDE SEMICONDUCTOR HAVING ABSORPTION PROPERTY IN VISIBLE LIGHT REGION, AND MANUFACTURING METHOD THEREFOR

机译:半透明膜制造方法,在可见光区域具有吸收性能的氧化物半导体及其制造方法

摘要

The present invention relates to a method for manufacturing an oxide semiconductor having absorption properties in the visible light region, the method comprising: an S1 step for forming a translucent film layer on a substrate in a non-vacuum state by using electrodeposition; and an S2 step for forming an active layer on the translucent film layer in a non-vacuum state by using electrodeposition, wherein the preferred orientation of the translucent film layer is determined in a particular direction, and the active layer grows in the particular direction determined in the translucent film layer. By controlling an electrochemical growth behavior through a metal surfactant, the present invention shows the effect of solving the high-resistivity problem, that is, the drawback of a p-type oxide semiconductor grown in a low-temperature electrodeposition process.
机译:本发明涉及一种用于制造在可见光区域具有吸收特性的氧化物半导体的方法,该方法包括:S1步骤,通过使用电沉积在非真空状态下在基板上形成半透明膜层。 S2,通过电沉积在非真空状态下在半透明膜层上形成活性层的S2步骤,其中,所述半透明膜层的优选取向在特定方向上确定,所述活性层在所确定的特定方向上生长在半透明膜层中。通过控制通过金属表面活性剂的电化学生长行为,本发明显示出解决高电阻率问题的效果,即在低温电沉积工艺中生长的p型氧化物半导体的缺点。

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