ENGINEERED POROSITY USING PILLAR AND AIR GAP STRUCTURES FOR RESONATOR ISOLATION FROM BULK

摘要

An apparatus is provided which comprises: a substrate, a piezoelectric resonator separated from a surface of the substrate by a void region, a first electrode coupled to a first surface of the piezoelectric resonator parallel to the substrate surface, and a second electrode coupled to a second surface of the piezoelectric resonator parallel to the substrate surface, the second electrode adjacent to the void region, wherein the void region comprises a plurality of pillars orthogonal to the substrate surface and encapsulated air gaps between the plurality of low-modulus pillars. Other embodiments are also disclosed and claimed.