LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS

摘要

A substrate support portion for a substrate processing system includes: a plurality of heating zones; a base plate; at least one of a heating layer and a ceramic layer arranged on the base plate; and a plurality of heating elements provided within the at least one of the heating layer and the ceramic layer. The heating elements include a first material having a first electrical resistance. A wire is provided through the base plate in a first zone of the heating zones. An electrical connection portion is routed from the wire in the first zone to a first heating element of the heating elements. The first heating element is arranged in a second zone of the heating zones and the electrical connection portion includes a second material having a second electrical resistance that is less than the first electrical resistance.