The measurement apparatus for capacitive membrane sensor using mechanical resonance characteristics of membrane and the method thereof

摘要

The present invention relates to a device and a method for measuring a condenser-type membrane sensor by using a mechanical resonance feature of a membrane. According to an embodiment of the present invention, the device for measuring the condenser-type membrane sensor by using the mechanical resonance feature of the membrane comprises: a signal supplying unit (23); a condenser-type membrane sensor (1); a signal measuring unit (25); and a control and signal processing unit (27). The device for measuring the condenser-type membrane sensor by using the mechanical resonance feature of the membrane precisely measures mass change of a sensing electrode (9), or pressure applied to the sensing electrode (9).