CONDENSER-TYPE MEMBRANE SENSOR MEASUREMENT DEVICE AND METHOD, WHICH USE MECHANICAL RESONANCE PROPERTY OF MEMBRANE

摘要

The present invention relates to a condenser-type membrane sensor measurement device and method, which use a mechanical resonance property of a membrane and, to a device and a method for applying, to a membrane sensor for sensing a condenser capacity change, an alternating current signal (alternating current voltage or current) and a direct current signal near a mechanical resonance frequency of a sensing electrode so as to maximize displacement of the sensing electrode, thereby increasing the measurement precision of a condenser-type membrane sensor.