SINGLE-CRYSTAL DIAMOND GROWTH BASE MATERIAL AND METHOD FOR MANUFACTURING SINGLE-CRYSTAL DIAMOND SUBSTRATE

摘要

An object of the present invention is to provide a base for growing a single crystal diamond and a method of manufacturing a single crystal diamond substrate which can grow a single crystal diamond having a large area and good crystallinity and can produce a high quality single crystal diamond substrate at low cost. A base material for growing a monocrystalline diamond, comprising at least a base substrate made of a material having a linear expansion coefficient smaller than MgO and of 0.5 x 10 ^-6 / K or more, and a base substrate formed by a bonding method on the side of the base substrate on which the single crystal diamond is grown A single crystal MgO layer and a film made of any one of an iridium film, a rhodium film, and a platinum film grown by heteroepitaxial growth on the single crystal MgO layer.