Weaknesses in the surface structure of an optic may result in damage initiated by exposure to high power laser energy. A subset of these laser-initiated surface damage sites will grow with continued laser exposure. These growing damage sites will negatively affect the life of the optic. A process to stabilize laser-initiated surface damage on KDP/DKDP optics by micro-machine contouring using a single-crystal diamond ball nose end mill has been shown to mitigate damage growth for subsequent laser exposure and thus extend optic life. The design
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