Sense of an actinic ray or a radiation sensitive composition and property, and the sense of composition with actinic ray or radiation-sensitive composition layer with Castle

摘要

An object of the present invention is to excellent heat stability and to provide a sense of an actinic ray or last radiation sensitive composition which enables to achieve a high sensitivity, good roughness characteristics. Sense of an actinic ray or a radiation-sensitive composition of the present invention, (A) in the organic-inorganic hybrid composition containing a metal or metalloid elements, and the aggregation domain size of the metal or metalloid elements of 1 to 5nm, metal or semi- a compound which generates an acid by the compound, (B) irradiation of actinic ray or radiation, characterized in that present to form a coordinated structure 1.2 to 2.0 molbae of the carboxylic acid and / or carboxylic acid derivatives with respect to the metal element (Q) and , (C) and an organic solvent.;