Positive sense actinic ray-sensitive or radiation-sensitive resin composition, as well as actinic ray-sensitive or radiation-sensitive resin layer and a pattern forming method using the composition

摘要

PROBLEM TO BE SOLVED: To provide a positive actinic ray-sensitive or radiation-sensitive resin composition which achieves high sensitivity, high resolution, a good pattern shape, good line edge roughness and suppression of outgassing, and an actinic ray-sensitive or radiation-sensitive resin film and a pattern formation method using the same.SOLUTION: A positive actinic ray-sensitive or radiation-sensitive resin composition contains a resin (P) including a repeating unit (A) having, in a side chain, nitrogen-containing heterocyclic cationic structure that is decomposed by irradiation of actinic ray or radiation for generating free acid.